III–V nanowire MOSFETs with novel self-limiting Λ-ridge spacers for RF applications
Semiconductor Science and Technology(2020)
摘要
We present a semi self-aligned processing scheme for III-V nanowire transistors with novel semiconductor spacers in the shape of Λ-ridges, utilising the effect of slow growth rate on {111}B facets. The addition of spacers relaxes the constraint on the perfect alignment of gate to contact areas to enable low overlap capacitances. The spacers give a field-plate effect that also helps reduce off-state and output conductance while increasing breakdown voltage. Microwave compatible devices with L g = 32 nm showing f T = 75 GHz and f max = 100 GHz are realized with the process, demonstrating matched performance to spacer-less devices but with relaxed scaling requirements.
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关键词
CMOS Scaling,High-Performance Nanoscale Devices,Nanowire Transistors,Tunnel Field-Effect Transistors,Nanosensors
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