Nanocomposite Fabricated By Low Energy Silver Ions Implanted Into Dielectrics And Sensitive To The Refractive Index Of Overlay

Based on 30 keV silver ions at a fluence of 6 x 10(16) ionscm(-2) implanted into SiO2, Al2O3 and YAG, we found that the nanocomposite layers embedded with silver nanoparticles are sensitive to the refractive index of overlays on the implanted surface. By dropping liquids with different refractive indices on the surface of nanocomposite layer, the reflection spectra of the rear surface would shift. The sample with YAG as the substrate has better performance by comparing with the other two samples. The prepared structures have the advantages of simple structure and stable performance, which has potential applications in localized surface plasmon resonance sensors.