Microstructural and Superconducting Radiofrequency Properties of Multilayer Sequentially Sputtered Nb₃Sn films

Nb3Sn is considered as a potential candidate for superconducting radiofrequency cavities for particle acceleration due to its higher transition temperature of 18.3 K and higher superheating field of 400 mT. Nb3Sn films can be grown inside the surface of a Nb cavity by sequentially sputtering multiple layers of Nb and Sn thin films followed by annealing at 950 °C for 3 h. We report on the properties of Nb3Sn films grown on Nb substrates by magnetron sputtering. The films' crystal structure, surface morphology, and composition were characterized by X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The films had a polycrystalline Nb3Sn structure with a fine-grain surface and an atomic Sn composition of ~23%. The RF surface resistance of the films was measured for different temperatures at 7.4 GHz to understand the feasibility of this method for the SRF application. The RF surface resistance of the films was 5 mΩ at 12 K, which is about 2 orders of magnitude higher than 60 μΩ previously measured in Nb3Sn films grown by Sn vapor diffusion. The sputtered film had a superconducting transition at 17.2 K, which is also lower than 17.9 K observed in Nb3Sn film prepared by vapor diffusion.