Optical Properties And Laser-Induced Breakdown Spectroscopy Analysis Of Al- Or Co-Doped Cuo Thin Films Prepared On Glass By Radio-Frequency Magnetron Sputtering

Glasses coated with a variety of thin films are extensively used. In the present study, copper oxide (CuO) thin films doped with aluminum (Al) or cobalt (Co) were prepared on the surface of soda lime glass substrates by radio-frequency magnetron sputtering deposition. The variation of the sputtering time resulted in the alteration of the composition of the films that caused changes in their optical properties as observed by energy dispersive Xray spectroscopy (EDS) and optical transmission spectroscopy, respectively. In addition, laser-induced breakdown spectroscopy analysis (LIBS) was used to achieve rapid qualitative and quantitative analyses of the doping elements in the CuO thin films. The elemental emission intensity ratios of Al/Cu in CuO-Al thin films and Co/Cu in CuO-Co thin films obtained by LIBS was employed to assess the optical properties of the coated glass samples. Overall, the results revealed that the LIBS technique allows to efficiently determine the elemental composition of doped CuO thin films deposited by RF magnetron sputtering and to simultaneously assess the corresponding optical properties of thin films.