Accurate On-Wafer Measurement Technique for E-Band MHMIC Communication Systems

2021 United States National Committee of URSI National Radio Science Meeting (USNC-URSI NRSM)(2021)

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摘要
The article has proposed a comprehensive analysis of on-wafer millimeter-wave measurements and addressed the challenges of calibration, measurements, and circuit characterization of E-band (60 to 90 GHz) circuits implemented on a thin ceramic substrate. The used thin ceramic substrate is suitable for miniaturized hybrid microwave integrated circuit fabrication at mm-wave frequencies. The proposed method is validated on a directional coupler, and a coupled-line bandpass filter in this frequency band. Simulation and experimental results are in great agreement at such high frequencies.
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关键词
directional coupler,accurate on-wafer measurement technique,miniaturized hybrid microwave integrated circuit fabrication,thin ceramic substrate,E-band circuits,circuit characterization,on-wafer millimeter-wave measurements,E-band MHMIC communication systems,coupled-line bandpass filter,mm-wave frequencies,frequency 60.0 GHz to 90.0 GHz
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