Meander-Type Transmission Line Design For On-Wafer Trl Calibration Up To 330 Ghz

In this work we present high frequency measurement results up to the WR-3 band (220-330 GHz) of test structures and a SiGe HBT calibrated with novel transmission line standards employing a meandering architecture for thru and lines, aiming to keep the inter-probe distance constant by avoiding any sort of probe displacement during measurement of the on-wafer TRL calibration standards. The measurements after TRL calibration using meander lines and straight lines are compared, as well as electromagnetic (EM) simulation.