Hierarchical simulation method for three-dimensional chip power supply ground network

The invention provides a hierarchical simulation method for a three-dimensional chip power supply ground network. The method comprises the following steps: inputting an original three-dimensional chip power supply ground network; decoupling the original three-dimensional chip power supply ground network so as to divide the original three-dimensional chip power supply ground network into a plurality of independent power supply ground networks with the number as same as the layer number; extracting a port equivalent model of each independent power supply ground network; establishing a new three-dimensional chip power supply ground network according to all the port equivalent models; solving the new three-dimensional chip power supply ground network to obtain port voltage and current of each layer of network; obtaining the internal node voltage of each layer of network according to the port voltage and current of each layer of network. According to the method provided by the invention, simulating calculation can be performed on each layer in parallel, so that the calculating efficiency is improved and the simulating complexity is reduced.