High-yield fabrication of perpendicularly magnetised synthetic antiferromagnetic nanodiscs

NANO RESEARCH(2021)

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摘要
Synthetic antiferromagnetic (SAF) particles with perpendicular anisotropy display a number of desirable characteristics for applications in biological and other fluid environments. We present an efficient and effective method for the patterning of ultrathin Ruderman-Kittel-Kasuya-Yoshida coupled, perpendicularly magnetised SAFs using a combination of nanosphere lithography and ion milling. A Ge sacrificial layer is utilised, which provides a clean and simple lift-off process, as well as maintaining the key magnetic properties that are beneficial to target applications. We demonstrate that the method is capable of producing a particularly high yield of well-defined, thin film based nanoparticles.
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关键词
nanodiscs,synthetic antiferromagnets,perpendicular anisotropy,sacrificial layers,nanofabrication
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