HfZrO Ferroelectric Characterization and Parameterization of Response to Arbitrary Excitation Waveform

Response of a metal\ferroelectric Hf _0.5 Zr _0.5 O ₂ \metal capacitor to an arbitrary excitation is investigated by polarization reversal curves and switching speed characterization. Results are explained in a steady-state Preisach as well as a modified transient NLS model framework. Applicability and limitations of each model are discussed. Switching speed measurements are found to be sensitive to parasitics. Separation of the intrinsic behavior from parasitics indicates the upper bound of the characteristic time constant of polarization switching speed is around 80ns in our sample.