Demonstration of efficient SBN thin film based miniaturized Mach Zehnder EO modulator

Materials Chemistry and Physics(2021)

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摘要
Micro- Electro-Mechanical-System technique has been utilized to fabricate an integrated SBN thin film based ridge structure Mach Zehnder Electro-optic (MZEO) modulator. Lower operating half wave voltage (Vπ)of 1.6 V and 1.3 V was obtained for SBN60 and SBN75 thin film based MZEO modulators respectively as compared to available modulators. An in-house setup was developed for efficiently monitoring the coupling of the light with the fabricated MZEO modulator and determining the modulation characteristics.
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关键词
Mach Zehnder,Waveguide,Opto-electronic,Electro-optic,SBN thin Film,Modulation
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