Synthesis of nanostructured calcite thin film by additive-free carbonation reaction via thermal chemical vapor deposition method

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS(2021)

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摘要
There is new development in nanostructured calcite research offering high potential sensitive application due to its non-toxic inorganic metal properties. Previous research revolves around calcium carbonate in powder form and mainly used as fillers in industry. However, nanostructured calcite thin film synthesis is lacking reports despite its potential. This work offers novel information on the synthesis of calcite thin film by additive-free thermal chemical vapor deposition method. It discussed the effect of deposition temperature to the chemical reaction and composition of the produced nanostructured thin film. Nanostructured calcite thin film deposited at 400 °C has shown single crystalline phase at 29° with calculated crystallite size of 27.8 nm. This work proposes basic substantial parameters that enable future study on CaCO 3 thin film for wider applications such as biosensor and photocatalyst.
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