Realizing Double Graded CIGSe Absorbers With the R2R Hybrid-CIGSe-Process

IEEE Journal of Photovoltaics(2021)

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摘要
This article presents an approach for industrial roll-to-roll (R2R) deposition of Cu(In,Ga)Se2 (CIGSe) thin films on stainless steel foil for use as absorber layers in flexible thin-film solar cells. The hybrid-CIGSe-deposition-process combines magnetron sputtering with evaporation techniques and allows the realization of a double graded CIGSe layer, reaching a conversion efficiency of currently up to 14.0% (w/o antireflective coating). The influence of different power settings of the individual magnetrons on the gallium profile is described. For a deeper understanding of differences between a static and an R2R process, a calculated flux diagram is presented. In the second part of this contribution, the homogeneity of the industrial scale samples is discussed by comparing the change in CGI and GGI over the foil width of 30 cm. The hybrid-CIGSe-deposition-process excels in a straightforward scalability for industrial usage due to the application of planar magnetron sputtering sources as metal vapor supply.
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关键词
${CGI}$ ,CIGSe, ${Cu^2}$ Se,evaporation,flexible PV,glow-discharge optical emission spectrometry (GD-OES), ${GGI}$ , GI-XRD,industrial approach,magnetron sputtering,roll-to-roll (R2R) processing,SEM
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