Transmission electron microscopy sample preparation method for micrometer-sized powder particles using focused ion beam

Micron(2021)

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摘要
•A TEM specimen preparation technique for micrometer-sized powder particle is proposed by using a FIB system.•This novel technique reduces the TEM sample preparation time, allowing higher efficiency compared to embedding methods.•This method enables the particles prepared for TEM sample with different size, shape or orientation to be easily selected.•The TEM lamella of an individual particle can be fixed by the ion-beam-deposited Pt brackets on both sides.•Both microstructure and EDX elemental mapping on the entire cross-section of the particle sample can be observed.
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关键词
Micrometer-sized powder particles,TEM sample preparation,FIB,Pt coating layers,Layers,EDX elemental mapping
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