A Compact Monitoring Circuit to Accurately Extract Fabrication Deviation in Silicon Waveguides

Tsuyoshi Horikawa,Hideaki Okayama,Yosuke Onawa,Daisuke Shimura,Jun Ushida,Akemi Shiina,Tadashi Murao,Hiroki Yaegashi

2020 European Conference on Optical Communications (ECOC)（2020）

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摘要

Novel optical circuit with a microring resonator and polarization rotators was proposed for process control monitoring. The extraction method by TE and TM spectral analysis using the circuit showed sensitivity to sub-nm order fabrication deviations as well as robustness to measurement errors.

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关键词

silicon waveguides,optical circuit,microring resonator,polarization rotators,process control monitoring,extraction method,sub-nm order fabrication deviations,compact monitoring circuit,fabrication deviation,TM spectral analysis,TE spectral analysis,Si

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