Practical Fractional-Order Variable-Gain Supertwisting Control with Application to Wafer Stages of Photolithography Systems
IEEE/ASME Transactions on Mechatronics（2021）
Key words
Uncertainty,Control systems,Semiconductor device modeling,Heuristic algorithms,Acceleration,Switches,Friction,Fractional order (FO),sliding-mode control (SMC),supertwisting control,variable gain,wafer stage
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