Low-Temperature Formation of Ohmic Contact for Si TFT Fabrication by Excimer Laser Doping with Phosphoric Acid Coating (シリコン材料・デバイス)
user-5f8cf9244c775ec6fa691c99（2018）
关键词
Ohmic contact,Excimer laser,Coating,Thin-film transistor,Phosphoric acid,Fabrication,Doping,Materials science,Optoelectronics
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