Film Characteristics deposited by Minimal Fab TiN Reactive Sputtering Tool (2)Shuichi Noda,Kazuhiro Koga,Kazumasa Nemoto,Yuuki Yabuta,Naoko Yamamoto,Ryuichiro Kamei,Sommawan Khumpuang,Shiro HaraThe Japan Society of Applied Physics(2019)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要