Estimation Of Pull-In Phenomena In Carbon Nanotubes Based Micro/Nanobeam Cantilevers
PROCEEDINGS OF THE 7TH INTERNATIONAL CONFERENCE ON ELECTRONIC DEVICES, SYSTEMS AND APPLICATIONS (ICEDSA2020)(2020)
摘要
In this paper, a Finite Element Method based simulation tool is used to estimate the pull-in phenomena of MWCNT based cantilever micro/nanobeams. In particular, different MWCNT micro/nanobeams are studied under electrostatic actuation. The pull-in voltage and height simulation results are verified by analytically driven formula and show the expected agreement. Making use of the quick predicting analytical formula accompanied by the simulation tool reported here is of particular usefulness in the design of micro/nanobeams implemented in different MEMS/NEMS devices such as switches and resonators.
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Nanomechanical testing
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