Suppressing channel-shortening effect of self-aligned coplanar Al-doped In-Sn-Zn-O TFTs using Mo-Al alloy source/drain electrode as Cu diffusion barrier

Wooseok Jeong,Jörg Winkler,Hennrik Schmidt,Kwang-Heum Lee,Sang-Hee Ko Park

Journal of Alloys and Compounds（2021）

引用 12|浏览5

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摘要

•High mobility (30 cm2/Vs) self-aligned oxide TFTs is introduced by applying Cu diffusion barriers. (Mo, Mo‒Ti, Mo‒Al)•The origin of the channel-shortening effect was observed.•Self-aligned oxide TFTs with Mo-Al alloy show highly stable characteristics against channel-shortening effect.

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关键词

MoAl alloy,Cu diffusion barrier,Self-aligned coplanar TFT,High-mobility,Hydrogen diffusion

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