Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry

Yusheng Bian,Javier Ayala,Colleen Meagher,Bo Peng,Michal Rakowski,Ajey Jacob,Karen Nummy,Andy Stricker,Zoey Sowinski,Asli Sahin,Abdelsalam Aboketaf,Shuren Hu, Ian Stobert,Kate Mclean,Louis Medina, Kevin Dezfulian,Brendan Harris,Subramanian Krishnamurthy,Thomas Houghton,Won Suk Lee,Massimo Sorbara, Dave Riggs,Ted Letavic,Anthony Yu,Ken Giewont, John Pellerin

Frontiers in Optics（2020）

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摘要

We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.

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