Design of Pulsed Neon Injection in the Synthesis of W-B-C Films Using Magnetron Sputtering from a Surface-Sintered Single Powder Cathode
Thin Solid Films（2020）
关键词
Surface sintering,High-melting temperature,Gas injection magnetron sputtering,Tungsten boron carbide,Nucleation,X-ray photoelectron spectroscopy,Microhardness
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