Nanoparticle Formation in Zinc-Ion-Implanated Quartz Upon Oxidation at Elevated Temperatures
JOURNAL OF SURFACE INVESTIGATION(2020)
摘要
The results of the synthesis of metallic zinc nanoparticles (NPs) and its oxide in amorphous quartz, implanted with 64 Zn + ions with an energy of 50 keV and a dose of 5 × 10 16 /cm 2 , and isochronously annealed in oxygen with a step of 100°C for 1 hour at each step in the temperature range of 400−900°C, are presented. For the study we use the methods of electron scanning and transmission microscopy in combination with energy-dispersive spectroscopy and electron diffraction, as well as atomic-force microscopy, optical transmission and photoluminescence. It is found that after implantation, a few Zn-containing NPs with a size of less than 100 nm are recorded on the quartz surface, and metal Zn NPs with a size of about 3 nm are recorded inside the sample body. It is established that during annealing, the implanted sample becomes more transparent as a constant transition from the opaque phase of metallic Zn to the transparent phases of its oxide and silicide occurs. After annealing at 700°C, the quartz surface becomes very developed and numerous Zn-containing NPs and craters are recorded on it; zinc-oxide nanoparticles with a size of 4.5 nm are formed in the sample body. In this case, a photoluminescence peak in the form of a doublet at a wavelength of 370 nm, caused by the ZnO phase, is formed on the spectrum. After annealing at 900°C, the zinc-oxide phase degrades and a willemite phase of Zn 2 SiO 4 is formed.
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关键词
quartz,implantation,annealing,nanoparticles,zinc,zinc oxide
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