Field Emission Induced-Damage In The Actuation Paths Of Mems Capacitive Structures

The field emission and resulting breakdown induced damage in the actuation paths of MEMS capacitive switches are investigated. The effect of asperities burning due to Joule heating and the resulting explosive break down are presented. The breakdown gives rise to almost mirror craters formation on the cathode and anode electrodes. A linear relation between crater diameter and the breakdown current is found when breakdown occurs in vacuum. In ambient atmosphere the breakdown leads to large amplitude current oscillations and the formation of extended damage on both electrodes.