Effect of tungsten doping on laser ablation and graphitization of diamond-like nanocomposite films

M.S. Komlenok,N.R. Arutyunyan,C. Freitag,E.V. Zavedeev,A.D. Barinov,M.L. Shupegin,S.M. Pimenov

Optics & Laser Technology（2021）

引用 7|浏览20

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摘要

•Wavelength-dependent laser processing of DLN (a-C:H:Si:O) and metal-doped DLN films.•W-doping has opposite effect on ablation rate/threshold for UV ns- and IR ps-pulses.•Laser-induced graphitization is stronger for metal-doped DLN films in most cases.•Graphitized layer thickness is ~4 nm after IR ps-laser processing of undoped films.

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关键词

DLN film,Tungsten doping,Laser ablation,Laser-induced graphitization,Raman spectroscopy

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