Detecting and Scoring Equipment Faults in Real Time During Semiconductor Test Processes

Yi-Hsin Wu, Jui-Yu Huang, Yi-Chun Yao, Yin-Jing Tien,Cheng-Juei Yu,Sheng-De Wang

IEEE Design & Test（2021）

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摘要

This article proposes a robust calculation method for the identification of anomalies in IC manufacturing test data while eliminating the need of large storage of raw measurements.

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关键词

anomaly detection,collective anomaly,equipment faults,robust statistics,semiconductor test processes

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