Long-Term Performance And Durability Of Ir/B4c Multilayer X-Ray Mirrors: Focusing On Composition, Structure, And Reflectivity Properties

JOURNAL OF ASTRONOMICAL TELESCOPES INSTRUMENTS AND SYSTEMS(2020)

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摘要
Multilayer (ML) thin film coatings have shown promise in achieving hard x-ray nanofocusing with high reflectivity and high resolution. The chemical, structural, and long-term stability of Ir/B4C MLs, which are of great interest to the synchrotron and astrophysics communities, are not yet fully understood. The evolution of the x-ray performance of Ir/B4C ML mirrors was monitored over 5 years, and the chemical and structural properties were investigated in depth. Reflectivity scans reveal significant alteration in the energy range of 3.4 to 10 keV over this period. Furthermore, thickness and density degradation of B4C layers were observed in scanning electron transmission microscopy results. The oxidation of B4C occurs only for the top layers, whereas the buried B4C layers go through various complex chemical modifications. The x-ray reflectivity model of Ir/B4C structure was modified, based on the experimental findings, and resulted in good understanding of the long-term reflectivity performance of the x-ray mirror coatings. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.
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关键词
x-ray mirror, multilayer, reflectivity, electron microscopy, thin film
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