Supercontinuum Generation in Dispersion-Engineered PECVD SiN Waveguides for a Yb-Fiber Laser Frequency Comb

Thomas Feigenson, Kelsey Johnsen,Dave Kharas,Wonseok Shin,Ryan Maxson,Kevin Bagnall,Adam Libson,Andrew Benedick,William Loh,Cheryl Sorace-Agaskar,Danielle Braje,Robert McConnell,Kyung-Han Hong

Conference on Lasers and Electro-Optics（2020）

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dispersion-engineered PECVD SiN waveguides,Yb-fiber laser frequency comb,octave-spanning supercontinuum generation,dispersion-engineered silicon nitride waveguides,plasma-enhanced chemical vapor deposition process,SiN

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