Effect of focused nanosecond laser pulse irradiation on microtribological properties of diamond-like films

QUANTUM ELECTRONICS(2020)

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摘要
We have examined the effect of focused nanosecond laser pulses on the formation and tribological properties of microstructures in the form of a matrix of craters produced in a-C : H : Si : O diamond-like films (DLFs), both undoped and doped with tungsten. The studies are performed by scanning probe microscopy (SPM) using SPM probes of standard design with a tip and probes without a tip (tipless-type probes). A special procedure is developed for assessing the wettability (contact angle) of individual sections of the laser-induced microstructure by the local adhesion force. According to estimates, the material inside the crater becomes softer and more hydrophobic as a result of laser irradiation. This is manifested to the greatest extent in tungsten-doped DLFs, where the crater walls are arranged like terraces formed by `nanoflakes', i.e. grains of the substance. Scanning of microstructures with a tipless probe in the regime of lateral force microscopy demonstrates a decrease in friction in the crater area.
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关键词
nanosecond laser pulses,diamond-like film,microstructure,microtribological properties
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