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Improved Critical Temperature of Superconducting Plasma-Enhanced Atomic Layer Deposition of Niobium Nitride Thin Films by Thermal Annealing

Liang Tian, Ivane Bottala-Gambetta, Victor Marchetto,Manoel Jacquemin,Alexandre Crisci,Roman Reboud,Arnaud Mantoux,Gregory Berthome,Frederic Mercier,Andre Sulpice,Laetitia Rapenne,Francois Weiss,Carmen Jimenez,Elisabeth Blanquet

Thin Solid Films（2020）

Cited 11|Views2
Key words
Atomic layer deposition,Niobium nitride,Plasma,Thin film,Superconducting properties
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