Problems Arising from Using KOH–IPA Etchant to Texture Silicon Wafers
Technical Physics(2020)
摘要
Wet chemical processing of single-crystal silicon wafers, including their texturing, is a key process step in the fabrication of high-efficiency solar cells. Methods of texturing single-crystal silicon wafers used in solar cell technology have been studied. Optimal texturing parameters have been determined for test samples, and the most effective etchant for texturing, a KOH–isopropanol solution, has been found.
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