Silicon nitride photonics: from visible to mid-infrared wavelengths

Proceedings of SPIE(2018)

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摘要
Silicon nitride has received a lot of attention during the last ten years, for applications such as bio-photonics, tele/datacom, optical signal processing and sensing. In this paper, firstly an updated review of the state of the art of silicon nitride photonics integration platforms will be provided. Secondly, our developments on a moderate confinement Si3N4 platform in the near-infrared will be presented. Finally, our steps towards establishing a Si3N4 based platform for broadband operation spanning from visible to mid-infrared wavelengths will be introduced.
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关键词
silicon nitride photonics,propagation loss,group index,group velocity dispersion,birefringence,full-field optical measurements,silicon photonics,photonic integrated circuits,generic integration,multi-project wafer
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