Drilling of sub-100 mu m hourglass-shaped holes in diamond with femtosecond laser pulses

We present images of microholes drilled in diamond using a homemade femtosecond Yb: KGW laser. We use a femtosecond laser source emitting pulses with a duration of 230 fs at a wavelength of 1030 nm, the focusing spot size amounting to 8.9 mu m. The effect of the pulse energy and the number of pulses on the microhole geometry (hole diameter, circularity, taper angle, and drilling quality) is evaluated. The obtained results demonstrate the feasibility of drilling of hourglass-shaped holes in a diamond sample, which have similar diameters at the hole entrance (92 mu m) and exit (95 mu m), but a much smaller diameter (28 mu m) at a certain waist section inside the hole.