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Design and Test of Precision Vertical and Horizontal Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range for X-Ray Instrumentation

Deming Shu,Barry Lai,Steven Kearney,Jayson Anton,Wenjun Liu,Jorg Maser,Christian Roehrig,Jonathan Z. Tischler

8th Int Particle Accelerator Conf (IPAC'17), Copenhagen, Denmark, 14–19 May, 2017（2017）

Cited 5|Views3
Key words
x-ray optics,precision motion control,nanopositioning stages
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