Optimization of Inkjet-Based Process Modules for Printed Transistor Circuits

We report on the development of inkjet-based process modules for printed transistor-based circuits. The requirement for realization of printed transistor-based circuits is the capability to print consistent fine lines for transistor electrodes and uniform/conformal layers of insulators and semiconductor islands on top of the printed electrodes by optimizing the printing parameters and surface energy of the underlying layers. The baseline processes accomplished the above-mention requirement were developed. In addition, we demonstrate novel process modules such as self-alignment of transistor electrodes, printed self-aligned interconnect and printed local interconnect by simultaneous dissolving and connecting the underlying metal layers. Lastly, a printed inverter circuit utilizing the complete printing modules was demonstrated to illustrate the simplicity and the feasibility of the inkjet-based process modules towards the realization of low-cost printed electronics