Reliability qualification of copper BEOL for manufacturing
MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS(2001)
摘要
After determining the technology requirements required to service the integrated circuit design community, a process technology must be demonstrated to be manufacturable. Often a process must be installed and qualified on multiple manufacturing lines and extended to a broader class of designs and tools than originally envisioned. This may accomplished through properly designed business processes and through adroit and effective empirical demonstrations.
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