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Laser Processing for 3D Junctionless Transistor Fabrication

D. Bosch,P. Acosta Alba,S. Kerdiles,V Benevent,C. Perrot,J. Lassarre,J. Richy,J. Lacord,B. Sklenard,L. Brunet,P. Batude,C. Fenouillet-Beranger,D. Lattard,J. P. Colinge,F. Balestra,F. Andrieu

IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference（2019）

Cited 3|Views26
Key words
laser,fabrication
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