A Helium Mass Spectrometry Pressed Integral Leak Detection Technique for Ultra-High Vacuum Devices
Proceedings of SPIE(2019)
摘要
Based on multi-weld seam of image intensifier tube, we have designed the leak detection platform for high vacuum electron devices, the experimental result show that Helium injection method's minimum leakage rate is 10(-11) Pa.m(3)/s, and pressed integration method's minimum leakage rate less than 10(-11) Pa.m(3)/s, and it is of positive significance to improve the life of the device.
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关键词
Helium mass spectrometer,Has tightness,Heak rate,Hressed integration method
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