Microchannels on aluminosilicate glass fabricated by selective laser etching

We demonstrate a technique called "In volume Selective Laser Etching" (ISLE) to combine femtosecond laser modification technique with chemical etching for the fabrication of microchannels in the aluminosilicate glass. The influence of laser power on the length-diameter ratio of microchannels is studied. We fabricated tapered aluminosilicate glass microchannels with diameters from 30 to 50 mu m. We used the same method to modify surface of aluminosilicate glass, and obtained taper-free microgrooves with a width of 50 mu m. The microgrooves had no length limitation. In industrial production, the surface roughness was also improved in this way.