Graphene Based Low Voltage Field Effect Transistor Coupled With Biodegradable Piezoelectric Material Based Dynamic Pressure Sensor

ACS APPLIED MATERIALS & INTERFACES(2020)

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摘要
Pressure sensors form the basic building block for realization of an electronic or tactile skin used in prothesis, robotics, and other similar applications. This paper presents a device consisting of biodegradable piezoelectric material based dynamic pressure sensor coupled with a graphene field-effect-transistor (GFET) operated at very low voltage (50 mV). The device has a biodegradable beta-glycine/chitosan composite based metal-insulator-metal (MIM) structure connected with GFET in an extended gate configuration. The developed device shows a sensitivity of 2.70 x 10(-4) kPa(-1) for a pressure range of 5-20 kPa and 7.56 x 10(-4) kPa(-1) for a pressure range between 20 and 35 kPa. A distinctive feature of the presented device is its very low operation voltage, which offers a significant advantage toward the development of energy efficient large-area electronic skin. Further, the biodegradability of piezoelectric material makes the presented sensors useful in terms of reduced electronic waste, which is currently another growing area of interest.
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关键词
GFET, biodegradable pressure sensor, glycine, piezoelectric transducer layer, electronic skin, low voltage transistor
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