High-quality and large-grain epi-like Si film by NiSi 2 -seed initiated lateral epitaxial crystallization (SILEC)
SCIENCE CHINA-INFORMATION SCIENCES(2020)
关键词
lateral epitaxial crystallization,si,high-quality,large-grain,epi-like
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要