Engineering Nanomaterials and Nanostructures for Electronic Applications: A Case Study of Carbon Nanotubes for Memory Devices

Rahul Sen, Thomas Kocab, Jennifer Black, Joseph McDermott, Sushanta K. Pal, Steve Buffat,David C. Gilmer,Thomas Rueckes

2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)（2020）

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摘要

A ultra-high purity carbon nanotube formulation and film is described. This material system has been successfully integrated into a semiconductor fabrication process for electronic device applications. Key challenges that were resolved to successfully implement this new material system into the semiconductor process are described.

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关键词

nanotechnology,carbon nanotubes,memory devices

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