Interdiffusion behaviors observation in TiN/ZrO N bilayer by XAS and ToF-SIMS

Yanyan Yuan,Philippe Jonnard,Karine Le Guen,Bingye Zhang,Anouk Galtayries,Angelo Giglia,Yuchun Tu,Chao Yan,Rui Lan,Rui Liu

Applied Surface Science（2020）

引用 3|浏览22

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摘要

•Three series of samples with different layer orders are prepared by magnetron sputtering method.•Interaction between TiN and ZrOxNy layers are fully understood by using XAS and ToF-SIMS.•Diffusion extent of O atoms in samples depends on the deposition order of layers.

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关键词

TiN/ZrOxNy,X-ray absorption spectroscopy (XAS),Time of flight secondary ion mass spectrometry (ToF-SIMS),Interdiffusion

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