Simulation Study Of Device Physics And Design Of Geoi Tfet With Pnn Structure And Buried Layer For High Performance*

CHINESE PHYSICS B(2020)

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摘要
Large threshold voltage and small on-state current are the main limitations of the normal tunneling field effect transistor (TFET). In this paper, a novel TFET with gate-controlled P(+)N(+)N(+)structure based on partially depleted GeOI (PD-GeOI) substrate is proposed. With the buried P+-doped layer (BP layer) introduced under P(+)N(+)N(+)structure, the proposed device behaves as a two-tunneling line device and can be shut off by the BP junction, resulting in a high on-state current and low threshold voltage. Simulation results show that the on-state current densityI(on)of the proposed TFET can be as large as 3.4 x 10(-4)A/mu m, and the average subthreshold swing (SS) is 55 mV/decade. Moreover, both ofI(on)and SS can be optimized by lengthening channel and buried P(+)layer. The off-state current density of TTP TFET is 4.4 x 10(-10)A/mu m, and the threshold voltage is 0.13 V, showing better performance than normal germanium-based TFET. Furthermore, the physics and device design of this novel structure are explored in detail.
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关键词
Ge-based TFET, two line tunneling paths, point tunneling, on-state current density
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