Investigation of Side-wall Etching for Germanium Fin Strcutre by Neutral Beam EtchingDaisuke Ohori,Shuichi Noda,Takuya Fujii,Wataru Mizubayashi,Kazuhiko Endo,En-Tzu Lee,Yiming Li,Yao-Jen Lee,Takuya Ozaki,Seiji SamukawaThe Japan Society of Applied Physics(2019)引用 0|浏览7暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要