Observer-Based 3-D Control Enhancement for Topographic Imaging--Validation With an STM Prototype

IEEE Transactions on Control Systems Technology(2021)

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摘要
This article proposes a control method using online state estimation techniques in order to enhance the capabilities of classical PI controllers as well as to improve the topographic imaging for an experimental scanning tunneling microscope-like device. In particular, a set of robust observers are designed following a recently proposed technique that takes advantage of control strategies in order ...
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关键词
Tunneling,Mathematical model,Couplings,Observers,Piezoelectric actuators,Microscopy
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