Growth defects in WC:H layers for tribological applications

Vacuum(2020)

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摘要
Friction and wear resistance are important factors in almost all branches of industry, as they affect lifetime, power consumption and other properties of all mechanical tools and machines. Diamond-like carbon (DLC) and derived metal-carbon composite (WC:H) layers are known to substantially improve both of these factors and frequently find their use in tribological applications.
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关键词
DLC,PACVD,AFM,SEM,FIB,RAMAN
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