Comprehensive Study Of The Rapid Stressed Mirror Polishing Method For Off-Axis Aspheric Sic Thin-Plate Mirrors

In this study, the stressed mirror polishing technique is used to perform off axis aspheric silicon carbide (SiC) mirror full-aperture polishing for the first time. Mechanical and optical parameter analysis methods have been proposed. A medium-diameter off-axis aspheric SiC thin-plate mirror is used as a scaling model for an optical system mirror. A full diameter polishing simulation was completed, and a conceptual design for stress loading equipment is presented. An initial aspheric surface method for stressed mirror polishing of an off-axis aspheric SiC thin-plate mirror, providing a reference for rapid stress mirror polishing of SiC mirrors, is also proposed. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement