A novel Terahertz Integrated Horn Antenna on Silicon Substrate

This paper reports the design and analysis of a novel pyramidal horn antenna based on Micro Electro Mechanical Systems (MEMS) technology, which is used in terahertz (THz) applications. The structure of the antenna includes two parts, pyramidal horn structure and rectangle waveguide for feed, the fabrication of the structure needs only one wafer, and the antenna can be easily integrated with other parts of on-chip circuits. There are many tunable parameters of the horn, so that high performance THz antenna can be achieved by optimizing these parameters. The proposed antenna can be manufactured by MEMS processing with low fabrication cost, suitable for many terahertz systems.