Next generation adaptive optics: a low-voltage ASIC driver for MEMS deformable mirrors

We report on a new generation of deformable mirror driver electronics that use application specific integrated circuit (ASIC) technology for integration with low-voltage (similar to 20 V) microelectromechanical (MEMS) deformable mirrors. The ASIC is designed and manufactured using a CMOS foundry to address the power consumption and signal routing complexity issues inherent to conventional drive electronics. A prototype 9-channel driver capable of producing a bipolar (+/-15 V) output signal has been designed and sent for fabrication. Simulation results and preliminary integration avenues for a fully packaged ASIC/MEMS device that exploit increasingly popular trends in the semiconductor industry will also be presented.