Low Cost Valveless Magnetic Micropumps Suitable for Array Applications

Low cost valveless micropumps based on electromagnetic actuation have been developed. The pumping performance of the electromagnetic micropump for water and gas was investigated. For water, a fluid velocity up to 40 mu l/min without backpressure was measured at a pump frequency of 26 Hz and a Current of 320 mA. For gas, fluid velocity up to 270 mu l/min without backpressure and a maximal backpressure of 900 Pa could be determined at 860 Hz and 350 mA. The planar design of the micropump for pumping water and gas allows the integration of an array of pumps on a single microfluidic chip.